# CMP slurries and pads: Regulation

How rare-earth export controls could reach chip polishing

Source page: https://www.materialinsights.org/chemicals/cmp_slurries/regulation/

What this tab covers How it is regulated and what could disrupt supply: hazard classification, rules in the EU, US and India, anti-dumping duties and other trade measures, and supply-risk notes.

#### Hazards

| Classification | UN number | Key risks |
|---|---|---|
| generally low hazard; oxidiser-containing slurries may be irritants (indicative) | usually not regulated (indicative) | Nanoparticle exposure; oxidiser handling. |

#### Main rules

| Where | Rule | Effect |
|---|---|---|
| **EU** | REACH nanomaterial reporting (indicative) | disclosure for nanoscale abrasives |
| **China** | Rare-earth export controls and quotas (2025, indicative) | could affect ceria supply |
| **US** | CHIPS Act incentives for materials suppliers (indicative) | supports local slurry and pad capacity |

#### India

| Rule | Effect |
|---|---|
| **Semicon India Programme and Semicon 2.0 incentives for speciality materials** | could support local slurry blending or pad finishing |
| **Water (Prevention and Control of Pollution) Act consents for fab effluent (indicative)** | slurry wastewater treatment |

#### Trade measures

- Chinese rare-earth export controls (indicative) affect ceria

#### Supply risk

Concentrated suppliers (DuPont pads over 50%; Fujifilm 31% of slurries) and Chinese dominance in rare earths for ceria. Rare earths are on the EU, US and Indian critical lists.

## Other sections

- [Summary](https://www.materialinsights.org/chemicals/cmp_slurries/index.md)
- [Overview](https://www.materialinsights.org/chemicals/cmp_slurries/overview/index.md)
- [Correlation](https://www.materialinsights.org/chemicals/cmp_slurries/correlation/index.md)
- [Production route](https://www.materialinsights.org/chemicals/cmp_slurries/routes/index.md)
- [Production](https://www.materialinsights.org/chemicals/cmp_slurries/production/index.md)
- [Feedstocks](https://www.materialinsights.org/chemicals/cmp_slurries/feedstocks/index.md)
- [Cycles](https://www.materialinsights.org/chemicals/cmp_slurries/cycles/index.md)
- [Trading](https://www.materialinsights.org/chemicals/cmp_slurries/trading/index.md)
- [Movement](https://www.materialinsights.org/chemicals/cmp_slurries/movement/index.md)
- [Characteristics](https://www.materialinsights.org/chemicals/cmp_slurries/characteristics/index.md)
- [Emissions](https://www.materialinsights.org/chemicals/cmp_slurries/emissions/index.md)
- [Relationships](https://www.materialinsights.org/chemicals/cmp_slurries/links/index.md)