# Electronic specialty gases: Regulation

How climate rules and export controls squeeze fluorinated gases

Source page: https://www.materialinsights.org/chemicals/electronic_gases/regulation/

What this tab covers How it is regulated and what could disrupt supply: hazard classification, rules in the EU, US and India, anti-dumping duties and other trade measures, and supply-risk notes.

#### Hazards

| Classification | UN number | Key risks |
|---|---|---|
| NF3: oxidising gas, acute toxicity; WF6: toxic, corrosive; silane: pyrophoric; arsine and phosphine: fatal if inhaled | UN2451 (NF3), UN2196 (WF6), UN2203 (silane) | Toxic releases and fires in gas cabinets; high-GWP emissions. |

#### Main rules

| Where | Rule | Effect |
|---|---|---|
| **EU** | F-gas Regulation (EU) 2024/573 and the proposed universal PFAS restriction cover several fluorinated etch gases (indicative) | pressure to abate and substitute |
| **US** | EPA Greenhouse Gas Reporting Program Subpart I for fabs (indicative) | reporting of fluorinated GHG emissions |
| **Russia** | Helium export controls from 14 April 2026 | tightened helium supply |

#### India

| Rule | Effect |
|---|---|
| **Semicon India Programme (Rs 76,000 crore) and Semicon 2.0 (Rs 1,27,500 crore, about $13-15 billion, approved by the Union Cabinet in July 2026) with incentives for materials, specialty chemicals and industrial gases** | subsidises local gas supply for fabs |
| **PESO Gas Cylinders Rules 2016; MSIHC Rules 1989** | licensing for toxic and compressed gases |

#### Trade measures

- Russia helium export controls (2026)
- US and Japanese export controls on chip tools affect Chinese gas demand (indicative)

#### Supply risk

Very high for single gases: neon (Ukraine and China), helium (US, Qatar, Russia), NF3 and WF6 (a few Korean, Japanese and Chinese plants). Helium and fluorspar are on several critical lists.

## Other sections

- [Summary](https://www.materialinsights.org/chemicals/electronic_gases/index.md)
- [Overview](https://www.materialinsights.org/chemicals/electronic_gases/overview/index.md)
- [Correlation](https://www.materialinsights.org/chemicals/electronic_gases/correlation/index.md)
- [Production route](https://www.materialinsights.org/chemicals/electronic_gases/routes/index.md)
- [Production](https://www.materialinsights.org/chemicals/electronic_gases/production/index.md)
- [Feedstocks](https://www.materialinsights.org/chemicals/electronic_gases/feedstocks/index.md)
- [Cycles](https://www.materialinsights.org/chemicals/electronic_gases/cycles/index.md)
- [Trading](https://www.materialinsights.org/chemicals/electronic_gases/trading/index.md)
- [Movement](https://www.materialinsights.org/chemicals/electronic_gases/movement/index.md)
- [Characteristics](https://www.materialinsights.org/chemicals/electronic_gases/characteristics/index.md)
- [Emissions](https://www.materialinsights.org/chemicals/electronic_gases/emissions/index.md)
- [Relationships](https://www.materialinsights.org/chemicals/electronic_gases/links/index.md)