# Photoresists: Emissions

Where a tiny, precious chemical's carbon footprint comes from

Source page: https://www.materialinsights.org/chemicals/photoresists/emissions/

Where a tiny, precious chemical's carbon footprint comes from What this tab covers The greenhouse-gas footprint per tonne, split by lifecycle phase (feedstock, production, movement, use, end of life), the global total, other environmental impacts, levers and low-carbon routes, India's position, and where the investment opportunity lies. Emission intensity 5.00 t CO2e per t range not published · indicative: solvent-dominated formulation (PGMEA about 2-3 t CO2e per t) plus energy-intensive cleanroom synthesis and filtration of specialty polymers and PAGs

Per t of formulated photoresist, cradle-to-gate. Intensity: indicative; no producer LCA found. Global total: not published.

#### Share of footprint by lifecycle phase
 Feedstock 50% Production / process 40% Movement 10%

#### Footprint by lifecycle phase

| Phase | Intensity | Share | Main sources of emissions | Notes | Source |
|---|---|---|---|---|---|
| **Feedstock** | about 2.5 t CO2e per t | 50% | petrochemical solvents, monomers and PAG synthesis | Indicative | Indicative |
| **Production / process** | about 2 t CO2e per t | 40% | multi-step synthesis, cleanroom filtration and cold storage | Indicative | Indicative |
| **Movement** | about 0.5 t CO2e per t | 10% | temperature-controlled and some air freight | Indicative | Indicative |
| **Use** | solvent VOCs evaporate during coating and baking | – | VOC emissions, usually abated by fab exhaust treatment | Indicative | Indicative |
| **End of life** | not published | – | solvent waste incinerated or recovered; stripped resist in wastewater | PFAS-containing waste is persistent | Indicative |

#### Other environmental impacts

PFAS in some photoacid generators and surfactants; solvent VOCs; tin and other metals in EUV resists.

#### Levers to cut emissions

- PFAS-free photoacid generators and surfactants
- Solvent recovery at fabs
- Lower-dose resists that cut EUV energy per wafer (indicative)
- Renewable power for cleanroom manufacturing

#### India

No production; India's fab and ATMP resist use is small today.
 Emission figures are indicative global averages from the life-cycle studies named; actual footprints vary widely by site, energy mix and method.

#### Low-carbon routes

| Route | Intensity | Cost premium | Status | Source |
|---|---|---|---|---|
| **PFAS-free resist formulations** | not published | not published | under development by major suppliers (indicative) | Indicative |

 For a climate investor Photoresist is not a decarbonisation play: its own footprint is small. The climate-relevant angles are PFAS-free chemistry and resists that need lower EUV doses, which cut fab power. For an India-focused fund it is a strategic-autonomy bet: Tata Electronics' MoUs with Fujifilm and JSR point to local formulation or packaging under licence, which only makes sense once Dholera volumes arrive (targeted FY2029-30). Expect Japanese partners to keep the core chemistry.

## Other sections

- [Summary](https://www.materialinsights.org/chemicals/photoresists/index.md)
- [Overview](https://www.materialinsights.org/chemicals/photoresists/overview/index.md)
- [Correlation](https://www.materialinsights.org/chemicals/photoresists/correlation/index.md)
- [Production route](https://www.materialinsights.org/chemicals/photoresists/routes/index.md)
- [Production](https://www.materialinsights.org/chemicals/photoresists/production/index.md)
- [Feedstocks](https://www.materialinsights.org/chemicals/photoresists/feedstocks/index.md)
- [Cycles](https://www.materialinsights.org/chemicals/photoresists/cycles/index.md)
- [Trading](https://www.materialinsights.org/chemicals/photoresists/trading/index.md)
- [Movement](https://www.materialinsights.org/chemicals/photoresists/movement/index.md)
- [Regulation](https://www.materialinsights.org/chemicals/photoresists/regulation/index.md)
- [Characteristics](https://www.materialinsights.org/chemicals/photoresists/characteristics/index.md)
- [Relationships](https://www.materialinsights.org/chemicals/photoresists/links/index.md)