# Ultra-pure wet chemicals: Characteristics

What parts per trillion purity looks like in practice

Source page: https://www.materialinsights.org/chemicals/wet_chemicals/characteristics/

What this tab covers The physical and chemical properties that set its grade, price and uses, with the commercial grades and the standards that define them.

Purity is the product: metal content, particle counts and anion levels decide the grade and price. SEMI standards define grades; leading-edge logic needs the highest. Consistency between lots matters as much as the average.

#### Properties that matter commercially

| Property | Value / specification | Why it matters | Source |
|---|---|---|---|
| **Metal impurities** | SEMI Grade 5: about 10 ppt or less per metal (indicative) | Metals on wafers cause defects and leakage | SEMI C-series standards (indicative) |
| **Particles** | a few particles above 0.05 micron per ml (indicative) | Particles kill dies | Indicative |
| **Assay** | H2SO4 96%; H2O2 31%; HF 49%; NH4OH 29% (common electronic concentrations, indicative) | Standard process recipes | Indicative |

#### Commercial grades

- SEMI Grade 1-5 (ppm to ppt)
- Electronic-grade sulphuric acid
- Electronic-grade hydrogen peroxide
- Electronic-grade HF and BOE
- Electronic-grade ammonium hydroxide, HCl, phosphoric, nitric
- Electronic-grade IPA
- TMAH developers

## Other sections

- [Summary](https://www.materialinsights.org/chemicals/wet_chemicals/index.md)
- [Overview](https://www.materialinsights.org/chemicals/wet_chemicals/overview/index.md)
- [Correlation](https://www.materialinsights.org/chemicals/wet_chemicals/correlation/index.md)
- [Production route](https://www.materialinsights.org/chemicals/wet_chemicals/routes/index.md)
- [Production](https://www.materialinsights.org/chemicals/wet_chemicals/production/index.md)
- [Feedstocks](https://www.materialinsights.org/chemicals/wet_chemicals/feedstocks/index.md)
- [Cycles](https://www.materialinsights.org/chemicals/wet_chemicals/cycles/index.md)
- [Trading](https://www.materialinsights.org/chemicals/wet_chemicals/trading/index.md)
- [Movement](https://www.materialinsights.org/chemicals/wet_chemicals/movement/index.md)
- [Regulation](https://www.materialinsights.org/chemicals/wet_chemicals/regulation/index.md)
- [Emissions](https://www.materialinsights.org/chemicals/wet_chemicals/emissions/index.md)
- [Relationships](https://www.materialinsights.org/chemicals/wet_chemicals/links/index.md)