How climate rules and export controls squeeze fluorinated gases
What this tab covers How it is regulated and what could disrupt supply: hazard classification, rules in the EU, US and India, anti-dumping duties and other trade measures, and supply-risk notes.
Hazards
Classification
UN number
Key risks
NF3: oxidising gas, acute toxicity; WF6: toxic, corrosive; silane: pyrophoric; arsine and phosphine: fatal if inhaled
UN2451 (NF3), UN2196 (WF6), UN2203 (silane)
Toxic releases and fires in gas cabinets; high-GWP emissions.
Main rules
Where
Rule
Effect
EU
F-gas Regulation (EU) 2024/573 and the proposed universal PFAS restriction cover several fluorinated etch gases (indicative)
pressure to abate and substitute
US
EPA Greenhouse Gas Reporting Program Subpart I for fabs (indicative)
reporting of fluorinated GHG emissions
Russia
Helium export controls from 14 April 2026
tightened helium supply
India
Rule
Effect
Semicon India Programme (Rs 76,000 crore) and Semicon 2.0 (Rs 1,27,500 crore, about $13-15 billion, approved by the Union Cabinet in July 2026) with incentives for materials, specialty chemicals and industrial gases
subsidises local gas supply for fabs
PESO Gas Cylinders Rules 2016; MSIHC Rules 1989
licensing for toxic and compressed gases
Trade measures
Russia helium export controls (2026)
US and Japanese export controls on chip tools affect Chinese gas demand (indicative)
Supply risk
Very high for single gases: neon (Ukraine and China), helium (US, Qatar, Russia), NF3 and WF6 (a few Korean, Japanese and Chinese plants). Helium and fluorspar are on several critical lists.