Material Insights · Understanding the Material World

CMP slurries and pads: Feedstocks

How rare earths end up polishing your phone's chips

How rare earths end up polishing your phone's chips What this tab covers What it is made from and what it feeds: the raw materials and energy per tonne with their share of cost (linked to the commodity table), who is low-cost and why, and the chemicals made from it.

Slurries are mostly water with a few percent of abrasive and additives; pads are polyurethane. Upstream, ceria comes from rare earths (mostly Chinese), silica from sodium silicate or silicon, and alumina from aluminium refining. Raw material cost is small; particle control and formulation decide value.

Inputs per tonne

InputQuantity per tonneRoleShare of costSource
REE Rare earthsa few percent of slurry by weight (indicative)oxide-selective abrasivenot publishedTECHCET (2024); indicative
Qz Silica sanda few percent of slurry (indicative)abrasivenot publishedIndicative
Al Aluminiuma few percent of metal slurries (indicative)hard abrasivenot publishedTECHCET (2024); indicative
Hydrogen peroxide and other oxidisersnot publishedchemical softening of metal filmssmallIndicative
Oil Crude oilnot applicablepad materialnot publishedIndicative

Who is low-cost, and why

Not a cost curve market: suppliers compete on defectivity, removal-rate consistency and co-development. Chinese suppliers compete on price in domestic fabs.

Raw materials on the commodity table

REE Rare earths