Material Insights · Understanding the Material World

CMP slurries and pads: Regulation

How rare-earth export controls could reach chip polishing

What this tab covers How it is regulated and what could disrupt supply: hazard classification, rules in the EU, US and India, anti-dumping duties and other trade measures, and supply-risk notes.

Hazards

ClassificationUN numberKey risks
generally low hazard; oxidiser-containing slurries may be irritants (indicative)usually not regulated (indicative)Nanoparticle exposure; oxidiser handling.

Main rules

WhereRuleEffect
EUREACH nanomaterial reporting (indicative)disclosure for nanoscale abrasives
ChinaRare-earth export controls and quotas (2025, indicative)could affect ceria supply
USCHIPS Act incentives for materials suppliers (indicative)supports local slurry and pad capacity

India

RuleEffect
Semicon India Programme and Semicon 2.0 incentives for speciality materialscould support local slurry blending or pad finishing
Water (Prevention and Control of Pollution) Act consents for fab effluent (indicative)slurry wastewater treatment

Trade measures

  • Chinese rare-earth export controls (indicative) affect ceria

Supply risk

Concentrated suppliers (DuPont pads over 50%; Fujifilm 31% of slurries) and Chinese dominance in rare earths for ceria. Rare earths are on the EU, US and Indian critical lists.